碲锌镉表面钝化层深度剖析及钝化工艺优化

doi:10.12066/j.issn.1007-2861.2057

Abstract

Abstract:

The influence of different passivation time and annealing on the surface morphology, electrical properties and composition of CdZnTe is studied via scanning electron microscopy (SEM), current-voltage (I-V) and X-ray photoelectron spectroscopy (XPS). The result shows that the optimum passivation time for two-step passivation method is 30 minutes, and the leakage current is close to the minimum. After the wafers are annealed for 60 minutes at 100 ℃, metallography and SEM show that the surface morphology after heat treatment is to a more considerable degree in uniformity and density. XPS depth analysis shows that chemical reaction intermediate decomposition is relatively complete and that TeO₂ content is increased. I-V test shows that the leakage current is reduced, which effectively improves the detector's performance.

Key words: CdZnTe, passivation, leakage current, composition, annealing

CLC Number:

TL814

ZHANG Ying, MIN Jiahua, LIANG Xiaoyan, LIU Zhaoxin, LI Ming, ZHANG Jijun, ZHANG Jiaxuan, ZHANG Delong, SHEN Yue, WANG Linjun. Passivation composition analysis and passivation process optimization of CdZnTe[J]. Journal of Shanghai University（Natural Science Edition）, 2020, 26(4): 538-543.

Figures/Tables 6

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Table 1

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References 12

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Passivation composition analysis and passivation process optimization of CdZnTe

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