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上海大学学报(自然科学版)

• 通信与信息工程 •    下一篇

感性可调MEMS电容性膜开关的微波等效模型分析

李越飞，杨雪霞，张文俊   

  1. 上海大学 通信与信息工程学院，上海 200072
  • 收稿日期:2005-05-12 修回日期:1900-01-01 出版日期:1900-01-01 发布日期:1900-01-01
  • 通讯作者: 杨雪霞

Microwave Equivalent Model of Tuned MEMS Shunt-Capacitive Switches

LI Yue-fei,YANG Xue-xia,ZHANG Wen-jun   

  1. School of Communication and Information Engineering, Shanghai University, Shanghai 200072, China

  • Received:2005-05-12 Revised:1900-01-01 Online:1900-01-01 Published:1900-01-01
  • Contact: YANG Xue-xia

摘要：

通过对感性可调MEMS电容性膜开关等效电路模型的电磁特性分析，建立了开关的“关”态谐振频率选择模型和“开”态阻抗匹配模型.从微波等效电路的角度提出高性能感性可调MEMS电容性膜开关的设计方法，同时给出了基于这两种模型设计X波段MEMS开关的“关”态隔离度与“开”态反射损耗的电路仿真结果，与高频电磁场全波仿真结果吻合较好，具有较高的实际应用价值.

关键词: 电磁特性, 电容性膜开关, 共面波导, 微机械电子系统

Abstract:

By analyzing electromagnetic characteristics of a microwave equivalent circuit model, the offstate resonance choice formulation and on-state impedance matching formulation of tuned MEMS shunt-capacitive switches is presented. A design method of tuned MEMS shunt-capacitive switches is developed based on an analysis of the microwave equivalent circuit. Numerical results of the circuit simulation of a MEMS switch for the X band based on these design models are described. Electromagnetic characteristics of the switch are confirmed with a high frequency full-wave simulation software. This is useful in designing high-performance RF MEMS switches.

Key words: CPW, electromagnetic-characteristic, shunt-capacitive switch, MEMS

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