(TA)5T 结构TiO2/Ag 组装薄膜的制备及其性能

doi:10.3969/j.issn.1007-2861.2015.04.006

上海大学学报(自然科学版) ›› 2016, Vol. 22 ›› Issue (6): 719-726.doi: 10.3969/j.issn.1007-2861.2015.04.006

(TA)₅T 结构TiO₂/Ag 组装薄膜的制备及其性能

韩薇, 王悦, 唐昊天, 于静静, 俞圣雯

上海大学材料科学与工程学院, 上海 200444

收稿日期:2015-02-06 出版日期:2016-12-30 发布日期:2016-12-30
通讯作者: 俞圣雯(1973—), 女, 副教授, 博士, 研究方向为智能薄膜的设计与组装及其智能响应机理模型. E-mail: yusw@staff.shu.edu.cn
作者简介:俞圣雯(1973—), 女, 副教授, 博士, 研究方向为智能薄膜的设计与组装及其智能响应机理模型. E-mail: yusw@staff.shu.edu.cn
基金资助:
上海市科委科技基金资助项目(15JC1400303)

Preparation and properties of (TA)₅T-structured TiO₂/Ag assembly films

HAN Wei, WANG Yue, TANG Haotian, YU Jingjing, YU Shengwen

School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China

Received:2015-02-06 Online:2016-12-30 Published:2016-12-30

摘要/Abstract

摘要：

采用磁控溅射法制备了不同Ag 含量的(TA)₅T 结构的TiO₂/Ag 组装薄膜, 并研究了薄膜的结构及其性能. 利用X 射线衍射(X-ray diffraction, XRD)仪分析了薄膜的物相结构, 扫描电子显微镜(scanning electron microscope, SEM)观察了薄膜的表面形貌, 用紫外可见分光光度计(ultraviolet-visible spectrophotometry, UV-VIS)研究了薄膜的吸收光谱, 采用Keithley 2400 测试了薄膜的I-V 曲线, 计算了薄膜的电阻率. 结果表明: 在N₂ 气氛中500 ℃ 退火60 min, 制备得到的(TA)5T 结构TiO₂/Ag 组装薄膜中的TiO₂呈锐钛矿相, 并且随着Ag 含量的增加, TiO₂晶粒变大; 分布在组装薄膜表面的Ag 纳米颗粒形状不规则、大小不统一且分布不均匀; 与纯TiO₂薄膜对比, (TA)₅T组装薄膜的吸收边蓝移, 出现了表面等离子体共振(surface plasmon resonance, SPR)吸收峰, 且其电阻率随着Ag 含量的增加而减小, 并可通过调节Ag 层厚度来调控Ag 含量, 从而调控等离子体共振峰的峰位.

关键词: Ag 含量 , 表面等离子体共振, 磁控溅射法 , TiO₂/Ag 组装薄膜

Abstract:

(TA)₅T-structured TiO₂/Ag assembly films with different Ag contents were prepared by magnetron sputtering, and its phase constitution and properties were studied. The film structure of TiO₂/Ag assembly films was analyzed with X-ray diffraction(XRD), and surface morphology was observed with scanning electron microscope (SEM). Absorption spectrums of the films were measured with ultraviolet-visible spectrophotometry(UV-VIS). Resistivities of the films were calculated from I-V curves measured with a Keithley 2400. The results showed that anatase phase of TiO₂ was formed in all (TA)₅Tstructured TiO₂/Ag assembly films annealed at 500 ℃ for 60 min in an N₂ furnace. The main crystalline size of TiO₂ increased with the increasing Ag content. Irregular-shaped and different-sized Ag nanoparticles distributed unevenly on the film surface. Compared with pure TiO₂ films, the absorption edges of (TA)₅T-structured TiO₂/Ag assembly films shifted toward blue and had surface plasmon resonance (SPR) absorption peaks. Resistivities of the films decreased with the increasing Ag content. In (TA)₅T-structured TiO₂/Ag assembly films, the position of surface plasmon resonance could be regulated roughly through changing the Ag content.

Key words: Ag content, magnetron sputtering, surface plasmon resonance (SPR), TiO₂/Ag assembly film

韩薇, 王悦, 唐昊天, 于静静, 俞圣雯. (TA)₅T 结构TiO₂/Ag 组装薄膜的制备及其性能[J]. 上海大学学报(自然科学版), 2016, 22(6): 719-726.

HAN Wei, WANG Yue, TANG Haotian, YU Jingjing, YU Shengwen. Preparation and properties of (TA)₅T-structured TiO₂/Ag assembly films[J]. Journal of Shanghai University（Natural Science Edition）, 2016, 22(6): 719-726.

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(TA)₅T 结构TiO₂/Ag 组装薄膜的制备及其性能

Preparation and properties of (TA)₅T-structured TiO₂/Ag assembly films

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