Preparation of Half-Heusler Compound Semiconductor TiCoSb Thin Film by Magnetron Sputtering
ZHANG Min, QIN Juan, SUN Niu-yi, ZHANG Xiao-li, SHI Wei-min
Journal of Shanghai University(Natural Science Edition) . 2013, (1): 71 -74 .  DOI: 10.3969/j.issn.1007-2861.2013.01.014