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Journal of Shanghai University >

2020 , Vol. 26 >Issue 4: 538 - 543

DOI: https://doi.org/10.12066/j.issn.1007-2861.2057

Passivation composition analysis and passivation process optimization of CdZnTe

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  • School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China

Received date: 2018-04-02

  Online published: 2018-12-21

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Abstract

The influence of different passivation time and annealing on the surface morphology, electrical properties and composition of CdZnTe is studied via scanning electron microscopy (SEM), current-voltage (I-V) and X-ray photoelectron spectroscopy (XPS). The result shows that the optimum passivation time for two-step passivation method is 30 minutes, and the leakage current is close to the minimum. After the wafers are annealed for 60 minutes at 100 ℃, metallography and SEM show that the surface morphology after heat treatment is to a more considerable degree in uniformity and density. XPS depth analysis shows that chemical reaction intermediate decomposition is relatively complete and that TeO2 content is increased. I-V test shows that the leakage current is reduced, which effectively improves the detector's performance.

Key words： CdZnTe; passivation; leakage current; composition; annealing

Cite this article

ZHANG Ying, MIN Jiahua, LIANG Xiaoyan, LIU Zhaoxin, LI Ming, ZHANG Jijun, ZHANG Jiaxuan, ZHANG Delong, SHEN Yue, WANG Linjun . Passivation composition analysis and passivation process optimization of CdZnTe[J]. Journal of Shanghai University, 2020 , 26(4) : 538 -543 . DOI: 10.12066/j.issn.1007-2861.2057

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