Abstract:

A micromachined accelerometer with piezoelectric thin film based on the piezoelectric effect is studied. By static analysis of accelerometer with twolayer piezoelectric thin film （PZT）, a sensitivity formula is derived, and numerical calculation is then performed. It is found that sensitivity first increases with the increase of PZT thickness, and reversed when the thickness reaches a certain level. Dynamics analysis is discussed. Noise, the quality factor and the minimum detectable signal are obtained. Curves of the dynamic response can be obtained with ANSYS in the harmonic analysis.

Key words: micromachined accelerometer; piezoelectric effect; piezoelectric thin film; sensitivity