Abstract:

The structure of sawtooth microvalve used in valveless micropump with piezoelectric actuator is designed. The orthogonal design is adopted in optimizing the structure. Using the data of flow rate and pressure loss obtained in computational fluid dynamics (CFD) simulation, the range analysis and variance analysis of the different combination of width, depth, length, taper and diffuser angle are performed. The optimal level combination and signicifance level of several structural parameters are obtained. Availibality of the optimal combination is testified in simulation.

Key words: valveless micropump; sawtooth channel; orthogonal design; structural optimization