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Journal of Shanghai University（Natural Science Edition）

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Preparation of SandwichLike Multilayered PbxSr1-xTiO3 Thin

Film wit
h Study of Dielectric Tunability and Temperature Stability

WU Wen-biao,ZHOU Dong-yi,JIN Deng-ren, MENG Zhong-yan
  

  1. School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China
  • Received:2008-05-05 Revised:1900-01-01 Online:2008-10-23 Published:2008-10-23
  • Contact: WU Wen-biao

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Abstract: A sandwich-like multilayered lead strontium titanate PbxSr1-xTiO3 (PST20-40) thin film was fabricated on Pt/Ti/SiO2/Si substrates using the sol-gel technique. PST20-40-20 thin films have high tunability and low loss tangent. Tunability and FOM of PST20-40-20 thin films are 52 and 45, respectively. PST20-40-20 thin films have weaker temperature dependence, and the decreasing rate of tunability for PST20-40-20 thin films is about 8% at 20 °C to 100 °C.

Key words: dielectric tunability properties, multilayer, PST thin films, sol-gel technique, temperature stability

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