中文

Journal of Shanghai University（Natural Science Edition） ›› 2006, Vol. 12 ›› Issue (2): 150-157 .

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Advances in Theoretical Study and Engineering-Application of Nano-Actuators

ZHANG Yong-yu,CHEN Xiao-yang   

  1. School of Mechatronical Engineering and Automation, Shanghai University, Shanghai 200072, China

  • Received:2005-05-08 Revised:1900-01-01 Online:1900-01-01 Published:1900-01-01
  • Contact: CHEN Xiao-yang

Cited

2

Abstract:

Nano-actuators are devices and structure that can be actuated in the range of 0.1～100 nm. Nano-actuators are sorted into conventional dimension nano-actuators, micro scale nano-actuators and nano-machine actuators. The same characteristic is the nano-scale precision of driving and positioning. Research statusand main accomplishments of nano-actuators are summarized in detail. In particular, typical driving mechanisms of micro-scale nano-actuators appeared in the recent years are introduced. In addition, the key technology, existing problems and application prospect of nanoactuators are analyzed.

Key words: MEMS, micro scale, micro-machined actuators, nanomachine, nano-actuators