Abstract:

Nano-actuators are devices and structure that can be actuated in the range of 0.1～100 nm. Nano-actuators are sorted into conventional dimension nano-actuators, micro scale nano-actuators and nano-machine actuators. The same characteristic is the nano-scale precision of driving and positioning. Research statusand main accomplishments of nano-actuators are summarized in detail. In particular, typical driving mechanisms of micro-scale nano-actuators appeared in the recent years are introduced. In addition, the key technology, existing problems and application prospect of nanoactuators are analyzed.

Key words: MEMS, micro scale, micro-machined actuators, nanomachine, nano-actuators