Journal of Shanghai University（Natural Science Edition）
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LI Yue-fei,YANG Xue-xia,ZHANG Wen-jun
School of Communication and Information Engineering, Shanghai University, Shanghai 200072, China
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By analyzing electromagnetic characteristics of a microwave equivalent circuit model, the offstate resonance choice formulation and on-state impedance matching formulation of tuned MEMS shunt-capacitive switches is presented. A design method of tuned MEMS shunt-capacitive switches is developed based on an analysis of the microwave equivalent circuit. Numerical results of the circuit simulation of a MEMS switch for the X band based on these design models are described. Electromagnetic characteristics of the switch are confirmed with a high frequency full-wave simulation software. This is useful in designing high-performance RF MEMS switches.
Key words: CPW, electromagnetic-characteristic, shunt-capacitive switch, MEMS
LI Yue-fei;YANG Xue-xia;ZHANG Wen-jun. Microwave Equivalent Model of Tuned MEMS Shunt-Capacitive Switches[J]. Journal of Shanghai University（Natural Science Edition）.
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https://www.journal.shu.edu.cn/EN/Y2006/V12/I2/111
