多循环快速热退火诱导普通玻璃衬底非晶硅薄膜晶化
於凡枫，金晶，史伟民，瞿晓雷，许月阳
Crystallization of Amorphous Silicon Films on Glass Substrate by Multi-cycle Rapid Thermal Annealing
YU Fan-feng,JIN Jing,SHI Wei-min,QU Xiao-lei,XU Yue-yang
上海大学学报(自然科学版)
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2012, (3): 327
-330
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DOI: 10.3969/j.issn.1007-2861.2012.03.021
