基于Si3N4 探针的单晶硅表面小线宽结构的摩擦诱导纳米加工

doi:10.3969/j.issn.1007-2861.2014.04.006

上海大学学报(自然科学版) ›› 2014, Vol. 20 ›› Issue (6): 669-679.doi: 10.3969/j.issn.1007-2861.2014.04.006

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基于Si₃N₄探针的单晶硅表面小线宽结构的摩擦诱导纳米加工

钱林茂(1971—), 男, 教授, 博士生导师, 博士, 研究方向为纳米摩擦学和微纳制造等.E-mail: linmao@swjtu.edu.cn

西南交通大学牵引动力国家重点实验室摩擦学研究所, 成都610031

收稿日期:2014-10-25 出版日期:2014-12-23 发布日期:2014-12-23
通讯作者: 钱林茂(1971—), 男, 教授, 博士生导师, 博士, 研究方向为纳米摩擦学和微纳制造等.E-mail: linmao@swjtu.edu.cn
作者简介:钱林茂(1971—), 男, 教授, 博士生导师, 博士, 研究方向为纳米摩擦学和微纳制造等. E-mail: linmao@swjtu.edu.cn
基金资助:
国家自然科学基金资助项目(91323103, 51175441)

Friction-Induced Nanofabrication of Small Line-Width Structure on Silicon Surface Based on Si3N4 Probe

YAO Yang-yang, CHEN Lei, GUO Jian, QIAN Lin-mao

Tribology Research Institute, National Traction Power Laboratory,Southwest Jiaotong University, Chengdu 610031, China

Received:2014-10-25 Online:2014-12-23 Published:2014-12-23

摘要/Abstract

摘要： 针对传统纳米加工方法存在的操作复杂和成本昂贵等问题, 提出采用以表面自然氧化层作为掩膜, 结合Si₃N₄ 探针扫描和KOH 溶液后续选择性刻蚀的摩擦诱导纳米加工方法. 基于针尖半径对加工线宽影响的规律, 实现了单晶硅表面较小线宽沟槽结构的加工. 在此基础上, 通过研究沟槽深度随刻蚀时间的变化规律, 确定了最佳的刻蚀加工时间, 并详细研究了载荷以及针尖扫描次数对表面沟槽结构加工的影响规律. 该方法无需专门制备掩膜, 操作简单,有望应用于加工功能表面织构、表面微阀、微反应器及单电子器件等,为纳米结构的加工提供了新途径.

关键词: 单晶硅, 氮化硅探针, 摩擦诱导纳米加工, 选择性刻蚀

Abstract: Talking into account limitations of traditional nanofabrication approaches such as complicated manipulation and high cost, a new friction-induced fabrication method is proposed. With the native oxidation layer as etching “mask”, nanofabrication of silicon can be achieved by scanning with a Si₃N₄probe and subsequent selective etching in KOH solution. By optimization of the tip radius, the groove structure with small line-width can be realized on monocrystalline silicon surface. Then, etching time dependence of groove depth is investigated to determine the best etching time for fabricating nanostructure.Finally, the effect of applied load and number of sliding cycles on nanostructure fabrication is studied. As a maskless and simple method, the proposed nanofabrication approach makes possible to fabricate surface texture with special functions, micromechanical valves for fluidic manipulation, single-electron devices, etc. With these advantages and potential applications, the direct fabrication method provides opportunities for nanofabrication

Key words: friction-induced nanofabrication, selective etching, silicon nitride probe;monocrystalline silicon

姚洋洋, 陈磊, 郭剑, 钱林茂. 基于Si₃N₄探针的单晶硅表面小线宽结构的摩擦诱导纳米加工[J]. 上海大学学报(自然科学版), 2014, 20(6): 669-679.

YAO Yiang-Yiang, CHEN Lei, GUO Jian, JIAN Lin-Mao. Friction-Induced Nanofabrication of Small Line-Width Structure on Silicon Surface Based on Si3N4 Probe[J]. Journal of Shanghai University（Natural Science Edition）, 2014, 20(6): 669-679.

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基于Si₃N₄探针的单晶硅表面小线宽结构的摩擦诱导纳米加工

Friction-Induced Nanofabrication of Small Line-Width Structure on Silicon Surface Based on Si3N4 Probe

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