基于Si3N4 探针的单晶硅表面小线宽结构的摩擦诱导纳米加工
姚洋洋, 陈磊, 郭剑, 钱林茂
Friction-Induced Nanofabrication of Small Line-Width Structure on Silicon Surface Based on Si3N4 Probe
YAO Yiang-Yiang, CHEN Lei, GUO Jian, JIAN Lin-Mao
上海大学学报(自然科学版)
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2014, (6): 669
-679
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DOI: 10.3969/j.issn.1007-2861.2014.04.006
