正交相二氧化锡薄膜的制备与性能

doi:10.3969/j.issn.1007-2861.2013.01.019

上海大学学报(自然科学版) ›› 2013, Vol. 19 ›› Issue (1): 95-99.doi: 10.3969/j.issn.1007-2861.2013.01.019

正交相二氧化锡薄膜的制备与性能

陈琛, 王利军, 陈志文, 焦正, 吴明红

上海大学环境与化学工程学院, 上海200444

收稿日期:2012-04-05 出版日期:2013-02-28 发布日期:2013-02-28
通讯作者: 陈志文(1962—), 男, 教授, 博士生导师, 研究方向为纳米材料的合成与表征. E-mail:zwchen@shu.edu.cn
作者简介:陈志文(1962—), 男, 教授, 博士生导师, 研究方向为纳米材料的合成与表征. E-mail: zwchen@shu.edu.cn
基金资助:
国家自然科学基金资助项目(11025526, 41073073); 上海市重点学科建设资助项目(S30109); 上海市科委基金资助项目(10JC1405400, 09530501200)

Preparation and Properties of Orthorhombic SnO₂Thin Films

CHEN Chen, WANG Li-jun, CHEN Zhi-wen, JIAO Zheng, WU Ming-hong

School of Environmental and Chemical Engineering, Shanghai University, Shanghai 200444, China

Received:2012-04-05 Online:2013-02-28 Published:2013-02-28

摘要/Abstract

摘要： 二氧化锡(SnO₂)的一种晶体结构——正交相是高温高压相, 不易合成, 因此, 其性质探测和技术应用研究一直停滞不前. 利用脉冲激光沉积(pulsed laser deposition, PLD)技术, 在相对较低压力和较低温度下制备较纯的正交相SnO₂薄膜. 实验结果表明, 这种正交相SnO₂薄膜的透明度优于常规四方相SnO₂, 其半导体带隙大于四方相SnO₂.

关键词: 薄膜, 脉冲激光沉积, 二氧化锡SnO₂ 正交相

Abstract: Orthorhombic phase SnO₂ is a material with unknown optical, electrical, and gas sensing properties. It was found previously only at high pressures and temperatures. Using pulsed laser deposition (PLD), this paper reports a kind of experimental realization of a pure orthorhombic SnO₂ thin film under low pressure and temperature that are much lower than those of traditional methods. The optical properties of an orthorhombic SnO₂ thin film were measured by spectrophotometric transmittance. An oxygen exchange reaction mechanism at the grain interfaces is proposed to explain the formation and optical properties of this orthorhombic phase.

Key words: orthorhombic, pulsed laser deposition (PLD), thin film, SnO^₂

中图分类号:

TU 411

陈琛, 王利军, 陈志文, 焦正, 吴明红. 正交相二氧化锡薄膜的制备与性能[J]. 上海大学学报(自然科学版), 2013, 19(1): 95-99.

CHEN Chen, WANG Li-jun, CHEN Zhi-wen, JIAO Zheng, WU Ming-hong. Preparation and Properties of Orthorhombic SnO₂Thin Films[J]. Journal of Shanghai University（Natural Science Edition）, 2013, 19(1): 95-99.

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正交相二氧化锡薄膜的制备与性能

Preparation and Properties of Orthorhombic SnO₂Thin Films

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Preparation and Properties of Orthorhombic SnO2 Thin Films

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Preparation and Properties of Orthorhombic SnO₂Thin Films