压电薄膜微机电加速度传感器的力学分析

上海大学学报(自然科学版) ›› 2009, Vol. 15 ›› Issue (6): 621-627.

压电薄膜微机电加速度传感器的力学分析

孙博华，韩立锋

（开普半岛理工大学机械工程系，南非开普敦 7535）

收稿日期:2009-03-11 出版日期:2009-12-28 发布日期:2009-12-28
通讯作者: 孙博华(1963～)，男，教授，博士后导师,博士,研究方向为应用力学、智能结构和微机电系统. Email:bohua.sun@gmail.com
作者简介:孙博华(1963～)，男，教授，博士后导师,博士,研究方向为应用力学、智能结构和微机电系统. Email:bohua.sun@gmail.com

Mechanical Analysis of Micromachined Accelerometer with Piezoelectric Thin Films Read-out

SUN Bohua,HAN Li-feng

(Department of Mechanical Engineering, Cape Peninsula University of Technology, Cape Town 7535, South Africa)

Received:2009-03-11 Online:2009-12-28 Published:2009-12-28

摘要/Abstract

摘要：

基于压电薄膜的压电效应，研究压电薄膜微机电加速度传感器.对双层压电薄膜微机电加速度传感器进行静力分析，得到传感器方程，并进行数值计算.结果表明，随着压电薄膜厚度的增大，灵敏度随之增大，在一定厚度下达到最大值，随着厚度的进一步增大，灵敏度反而减小.然后进行动力分析，得到噪音、质量因子、最小可测信号等技术参数，并进行了数值计算.运用ANSYS软件进行谐响应分析，得到不同频率下结构的动力响应曲线.

关键词: 微机电加速度传感器；压电效应；压电薄膜；灵敏度

Abstract:

A micromachined accelerometer with piezoelectric thin film based on the piezoelectric effect is studied. By static analysis of accelerometer with twolayer piezoelectric thin film （PZT）, a sensitivity formula is derived, and numerical calculation is then performed. It is found that sensitivity first increases with the increase of PZT thickness, and reversed when the thickness reaches a certain level. Dynamics analysis is discussed. Noise, the quality factor and the minimum detectable signal are obtained. Curves of the dynamic response can be obtained with ANSYS in the harmonic analysis.

Key words: micromachined accelerometer; piezoelectric effect; piezoelectric thin film; sensitivity

中图分类号:

O 313

孙博华，韩立锋. 压电薄膜微机电加速度传感器的力学分析[J]. 上海大学学报(自然科学版), 2009, 15(6): 621-627.

SUN Bohua,HAN Li-feng. Mechanical Analysis of Micromachined Accelerometer with Piezoelectric Thin Films Read-out[J]. Journal of Shanghai University（Natural Science Edition）, 2009, 15(6): 621-627.