多层结构钛酸锶铅薄膜及介电调谐与温度稳定性

上海大学学报(自然科学版)

多层结构钛酸锶铅薄膜及介电调谐与温度稳定性

吴文彪，周栋义，金灯仁，孟中岩

上海大学材料科学与工程学院，上海 200072

收稿日期:2008-05-05 修回日期:1900-01-01 出版日期:2008-10-23 发布日期:2008-10-23
通讯作者: 吴文彪

Preparation of SandwichLike Multilayered PbxSr1-xTiO3 Thin

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h Study of Dielectric Tunability and Temperature Stability

WU Wen-biao,ZHOU Dong-yi,JIN Deng-ren, MENG Zhong-yan

School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China

Received:2008-05-05 Revised:1900-01-01 Online:2008-10-23 Published:2008-10-23
Contact: WU Wen-biao

摘要/Abstract

摘要： 在研究组分、溶胶浓度对钛酸锶铅（PST）薄膜结构、介电、调谐性能等影响的基础上，设计一种以低损耗—高调谐—低损耗组分交替沉积的方法，研制了三明治多层结构的PST薄膜（PST20-40-20）.研究结果表明,这种三明治多层结构的薄膜表面致密，晶粒均匀，同时具有调谐率高、损耗低等特点，综合性能比单组分要好，其调谐率、优值分别为52和45.在20～100 ℃范围内调谐率变化幅度小于8%，提高了温度稳定性.

关键词: 多层结构, 介电调谐性能, 溶胶凝胶法, 钛酸锶铅薄膜, 温度稳定性

Abstract: A sandwich-like multilayered lead strontium titanate Pb_xSr_1-xTiO₃ (PST20-40) thin film was fabricated on Pt/Ti/SiO₂/Si substrates using the sol-gel technique. PST20-40-20 thin films have high tunability and low loss tangent. Tunability and FOM of PST20-40-20 thin films are 52 and 45, respectively. PST20-40-20 thin films have weaker temperature dependence, and the decreasing rate of tunability for PST20-40-20 thin films is about 8% at 20 °C to 100 °C.

Key words: dielectric tunability properties, multilayer, PST thin films, sol-gel technique, temperature stability

中图分类号:

TQ 17

吴文彪;周栋义;金灯仁;孟中岩. 多层结构钛酸锶铅薄膜及介电调谐与温度稳定性[J]. 上海大学学报(自然科学版).

WU Wen-biao;ZHOU Dong-yi;JIN Deng-ren;MENG Zhong-yan. Preparation of SandwichLike Multilayered PbxSr1-xTiO3 Thin

Film wit
h Study of Dielectric Tunability and Temperature Stability
[J]. Journal of Shanghai University（Natural Science Edition）.