Friction-Induced Nanofabrication of Small Line-Width Structure on Silicon Surface Based on Si3N4 Probe
YAO Yiang-Yiang, CHEN Lei, GUO Jian, JIAN Lin-Mao
Journal of Shanghai University(Natural Science Edition) . 2014, (6): 669 -679 .  DOI: 10.3969/j.issn.1007-2861.2014.04.006