Preparation of dumbbell-shaped silica abrasives and their chemical mechanical polishing performances

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  • 1. Research Center of Nano Science and Technology, College of Sciences, Shanghai University, Shanghai 200444, China; 2 Institute of Materials, School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China

Online published: 2021-09-10

Abstract

In this study, dumbbell-shaped silica abrasives were prepared by an anioninduced assisted growth method and characterized. The effects of the abrasives on the chemical mechanical polishing (CMP) performances of zirconia ceramics were then studied. The results showed that the abrasives had good stability and dispersion and exhibited excellent CMP properties. Compared with spherical silica abrasives, the material removal rate of the dumbbell-shaped silica abrasives increased by 39%, and the surfaces of the zirconia ceramics were flat and smooth following polishing, where the surface roughness was 1.960 nm. This was due to the fact the polishing fluid with the abrasives had good wettability and adequately contacted the surfaces of the zirconia ceramics, which helped to induce solid-phase chemical reactions. In addition, the coefficient of friction of the dumbbell-shaped silica was higher, significantly enhancing the mechanical effect.

Cite this article

DONG Yue, LEI Hong, LIU Wenqing . Preparation of dumbbell-shaped silica abrasives and their chemical mechanical polishing performances[J]. Journal of Shanghai University, 2023 , 29(2) : 345 . DOI: 10.12066/j.issn.1007-2861.2329

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