In this study, dumbbell-shaped silica abrasives were prepared by an anioninduced assisted growth method and characterized. The effects of the abrasives on the
chemical mechanical polishing (CMP) performances of zirconia ceramics were then studied.
The results showed that the abrasives had good stability and dispersion and exhibited
excellent CMP properties. Compared with spherical silica abrasives, the material removal
rate of the dumbbell-shaped silica abrasives increased by 39%, and the surfaces of the
zirconia ceramics were flat and smooth following polishing, where the surface roughness
was 1.960 nm. This was due to the fact the polishing fluid with the abrasives had good
wettability and adequately contacted the surfaces of the zirconia ceramics, which helped
to induce solid-phase chemical reactions. In addition, the coefficient of friction of the
dumbbell-shaped silica was higher, significantly enhancing the mechanical effect.
DONG Yue, LEI Hong, LIU Wenqing
. Preparation of dumbbell-shaped silica abrasives and
their chemical mechanical polishing performances[J]. Journal of Shanghai University, 2023
, 29(2)
: 345
.
DOI: 10.12066/j.issn.1007-2861.2329