磁控溅射法制备Half-Heusler化合物半导体TiCoSb薄膜
张敏, 秦娟, 孙钮一, 张小丽, 史伟民
Preparation of Half-Heusler Compound Semiconductor TiCoSb Thin Film by Magnetron Sputtering
ZHANG Min, QIN Juan, SUN Niu-yi, ZHANG Xiao-li, SHI Wei-min
上海大学学报(自然科学版)
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2013, (1): 71
-74
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DOI: 10.3969/j.issn.1007-2861.2013.01.014
