二氧化锡(SnO2)的一种晶体结构——正交相是高温高压相, 不易合成, 因此, 其性质探测和技术应用研究一直停滞不前. 利用脉冲激光沉积(pulsed laser deposition, PLD)技术, 在相对较低压力和较低温度下制备较纯的正交相SnO2薄膜. 实验结果表明, 这种正交相SnO2薄膜的透明度优于常规四方相SnO2, 其半导体带隙大于四方相SnO2.
Orthorhombic phase SnO2 is a material with unknown optical, electrical, and gas sensing properties. It was found previously only at high pressures and temperatures. Using pulsed laser deposition (PLD), this paper reports a kind of experimental realization of a pure orthorhombic SnO2 thin film under low pressure and temperature that are much lower than those of traditional methods. The optical properties of an orthorhombic SnO2 thin film were measured by spectrophotometric transmittance. An oxygen exchange reaction mechanism at the grain interfaces is proposed to explain the formation and optical properties of this orthorhombic phase.
[1] Watson J, Ihohura K, Coles G S V. The tin dioxide gas sensor [J]. Measurement Science and Technology, 1993, 4: 711-719.
[2] G¨opel W, Schierbaum K D. SnO2 sensors: current status and future prospects [J]. Sensors and Actuators B, 1995, 26: 1-12.
[3] 苏航, 陶城, 缪文泉, 等. 锂离子电池能源材料研究进展[J]. 上海大学学报: 自然科学版, 2011, 17(4): 555-561.
[4] Wykcoff R W G. Crystal structures [M]. New York: Interscience Publishers Inc, 1965: 112-114.
[5] Adams D M, Christy A G, Haines J. Second-order phase transition in PbO and SnO at high pressure: implications for the litharge-massicot phase transformation
[J]. Physical Review B, 1992, 46(18): 11358-11367.
[6] Suito K, Kawai N, Masuda Y. High pressure synthesis of orthorhombic SnO2 [J]. Mat Res Bull, 1975, 10: 677-680.
[7] Haines J, L´eger J M. X-ray diffraction study of the phase transitions and structural evolution of tin dioxide at high pressure: relationships between structure types
and implications for other rutile-type dioxides [J]. Physical Review B, 1997, 55(17): 11144-11154.
[8] Kra?sevec V, Prodan A, Hudomal J M, et al. A new form of SnO2 found during oxidation of -SnO thin films [J]. Phys Status Solidi A, 1985, 87: 127-133.
[9] Prodan A, Vene N, Sev?sek F, et al. The crystal structure of epitaxially grown SnO2 thin films [J]. Thin Solid Films, 1987, 147: 313-319.
[10] Kaplan L, Ben-Shalom A, Boxman R L, et al. Annealing and Sb-doping of Sn-O films produced by filtered vacuum arc deposition: structure and electrooptical
properties [J]. Thin Solid Films, 1994, 253: 1-8.
[11] Lu B, Wang C S, Zhang Y H. Electron beam induced crystallization in Fe-doped SnO2 nanoparticles [J]. Appl Phys Lett, 1997, 70(6): 717-719.
[12] Shek C H, Lai J K L, Lin G M, et al. Nanomicrostructure, chemical stability and abnormal transformation in ultrafine particles of oxidized tin [J]. J Phys Chem
Solids, 1997, 58(1): 13-17.
[13] Lamelas F J, Reid S A. Thin-film synthesis of the orthorhombic phase of SnO2 [J]. Physical Review B, 1999, 60(13): 9347-9352.
[14] Shek C H, Lai J K L, Gu T S, et al. Transformation evolution and infrared absorption spectra of amorphous and crystalline nano-Al2O3 powders [J]. Nano-
Structured Materials, 1997, 8: 605-610.
[15] Zhang J X, Li Y X, Shek C H, et al. Sensitivity to oxygen and response characteristics of nanocrystalline SnO2 at room temperature [J]. NanoStructured Materials,
1998, 10(1): 55-63.
[16] Shek C H, Lai J K L, Lin G M. Investigation of interface defects in nanocrystalline SnO2 by positron annihilation [J]. J Phys Chem Solids, 1999, 60: 189-193.
[17] Shek C H, Lai J K L, Lin G M. Effect of oxygen deficiency on the Raman spectra and hyperfine interactions of nanometer SnO2 [J]. NanoStructured Materials,
1999, 11(7): 831-835.
[18] Shek C H, Lai J K L, Lin G M. Grain growth in nanocrystalline SnO2 prepared by sol-gel route [J]. NanoStructured Materials, 1999, 11(7): 887-893.
[19] Gu H D, You L, Leung K M, et al. Growth of TiNiHf shape memory alloy thin films by laser ablation of composite targets [J]. Applied Surface Science, 1998, 127:
579-583.
[20] Gu H D, Leung K M, Chung C Y, et al. Pulsed laser deposition of NiTi shape memory alloy thin films with optimum parameters [J]. Thin Solid Films, 1998, 330:
196-201.
[21] Chen Z W, Lai J K L, Shek C H. Mystery of porous SnO2 thin film formation by pulsed delivery [J]. Chemical Physics Letters, 2006, 422(1/2/3): 1-5.
[22] Chen Z W, Lai J K L, Shek C H. High-resolution transmission electron microscopy investigation of nanostructures in SnO2 thin films prepared by pulsed laser
deposition [J]. Journal of Solid State Chemistry, 2005, 178(3): 892-896.
[23] Chen Z W, Lai J K L, Shek C H. Multifractal spectra of scanning electron microscope images of SnO2 thin films prepared by pulsed laser deposition [J]. Physics
Letters A, 2005, 345(1/2/3): 218-223.
[24] Chen Z W, Lai J K L, Shek C H, et al. Nucleation and growth of SnO2 nanocrystallites prepared by pulsed laser deposition [J]. Appl Phys A, 2005, 81(5): 959-962.
[25] Chen Z W, Jiao Z, Wu M H, et al. Microstructure evolution of oxides and semiconductor thin films [J]. Progress in Materials Science, 2011, 56(7): 901-1029.
[26] Wang J, Du J, Chen C, et al. Electron-beam irradiation strategies for growth behavior of tin dioxide nanocrystals [J]. The Journal of Physical Chemistry C,
2011, 115(42): 20523-20528.