上海大学学报(自然科学版) ›› 2020, Vol. 26 ›› Issue (4): 538-543.doi: 10.12066/j.issn.1007-2861.2057

• 研究论文 • 上一篇    下一篇

碲锌镉表面钝化层深度剖析及钝化工艺优化

张滢, 闵嘉华(), 梁小燕, 刘兆鑫, 李明, 张继军, 张家轩, 张德龙, 沈悦, 王林军   

  1. 上海大学 材料科学与工程学院,上海 200444
  • 收稿日期:2018-04-02 出版日期:2020-08-30 发布日期:2020-01-31
  • 通讯作者: 闵嘉华 E-mail:minjh@shu.edu.cn
  • 基金资助:
    国家自然科学基金资助项目(11675099)

Passivation composition analysis and passivation process optimization of CdZnTe

ZHANG Ying, MIN Jiahua(), LIANG Xiaoyan, LIU Zhaoxin, LI Ming, ZHANG Jijun, ZHANG Jiaxuan, ZHANG Delong, SHEN Yue, WANG Linjun   

  1. School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
  • Received:2018-04-02 Online:2020-08-30 Published:2020-01-31
  • Contact: MIN Jiahua E-mail:minjh@shu.edu.cn

摘要:

采用扫描电子显微镜(scanning electron microscopy,SEM)、X 射线光电子能谱 (X-ray photoelectron spectroscopy,XPS) 和电流-电压 (current-voltage, I-V)曲线等测试方法,分析了 CdZnTe 晶片两步溶液法钝化工艺参数对晶片的表面形貌、表面成分和电学性能的影响。研究发现,两步溶液法的最佳钝化时间为 30 min,此时漏电流接近最小。CdZnTe 钝化后经 100 ℃、60 min 的热处理,金相和 SEM 显示钝化层表面的形貌更为均匀致密,XPS 深度剖析表明化学反应中间产物分解较为完全,TeO2 含量增多,I-V 测试显示热处理后漏电流减小较为明显,有效提高了探测器的性能。

关键词: 碲锌镉, 钝化, 漏电流, 成分分析, 热处理

Abstract:

The influence of different passivation time and annealing on the surface morphology, electrical properties and composition of CdZnTe is studied via scanning electron microscopy (SEM), current-voltage (I-V) and X-ray photoelectron spectroscopy (XPS). The result shows that the optimum passivation time for two-step passivation method is 30 minutes, and the leakage current is close to the minimum. After the wafers are annealed for 60 minutes at 100 ℃, metallography and SEM show that the surface morphology after heat treatment is to a more considerable degree in uniformity and density. XPS depth analysis shows that chemical reaction intermediate decomposition is relatively complete and that TeO2 content is increased. I-V test shows that the leakage current is reduced, which effectively improves the detector's performance.

Key words: CdZnTe, passivation, leakage current, composition, annealing

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