应用科学学报 ›› 1998, Vol. 16 ›› Issue (2): 185-190.

• 论文 • 上一篇    下一篇

低压下C-H-O三元相图中金刚石生长区的边界探讨

万永中1, 张卫1, 王季陶1, 黄忠强2   

  1. 1. 复旦大学;
    2. 同济大学
  • 收稿日期:1996-10-13 修回日期:1997-10-16 出版日期:1998-06-30 发布日期:1998-06-30
  • 作者简介:万永中:博士生,复旦大学电子工程系CVD室,上海 200433
  • 基金资助:
    国家自然科学基金

A Study on the Boundaries of Diamond Growth Region Under Activated Low Pressure Conditions

WAN YONGZHONG1, ZHANG WEI1, WANG JITAO1, HUANG ZHONGQIANG2   

  1. 1. Department of Electronic Engineering, Fudan University, Shanghai 200433;
    2. Department of Applied Mathematics, Tongji University, Shanghai 200092
  • Received:1996-10-13 Revised:1997-10-16 Online:1998-06-30 Published:1998-06-30

摘要: 该文用非平衡热力学耦合模型计算了不同温度和压力范围的金刚石气相生长C-H-O三元非平衡定态投影相图,以及固定压力下对应于400K、600K、800K和1000K的等温截面相图,探讨了温度和压力对相图中金刚石生长区边界的影响.计算结果表明,金刚石生长区随温度的升高总体上将围绕其重心按逆时针方向逐渐转动,同时生长区的形状也会有大的变化.

关键词: 相图, 金刚石, 非平衡热力学

Abstract: Based on the non-equilibrium thermodynamic coupling model, the ternary C-H-O stationary non-equilibrium states phase diagrams are calculated under different temperature and pressure in this paper. The calculated results of the isothermal sections show that the whole diamond growth region will gradually rotate anti-clockwise around its core with the substrate temperature increasing while its shape changes greatly.

Key words: phase diagram, non-equilibrium thermodynamics, diamond